TY  - BOOK
AU  - Sze,S.M.
TI  - VLSI technology
SN  - 9780070582910
U1  - 621.395 22
PY  - 1988///
CY  - New Delhi
PB  - Tata McGraw-Hill
KW  - Electrical & electronics engineering
KW  - Integrated circuits- Very large scale integration
N1  - Includes bibliographies and index; EEE
UR  - http://www.loc.gov/catdir/toc/mh021/87022803.html
ER  -